High-voltage MEMS driver

The new HV264 quad amplifier array from Supertex is designed for a variety of MEMS and other high-voltage drive applications, such as driving optical MEMS and piezoelectric transducers.

Potential areas of application are MEMS micromirror drives as seen in optical networking and communications, test and measurement, printing, component alignment, 3D position tracking and positioning such as for gaming, laser marking, small and transparent displays, biomedical instrumentation and imaging, and more. Potential piezoelectric applications include security sensors, fluid measurement and more.

The four channels of the IC consist of four independent high-voltage amplifiers, capable of inverting or non-inverting configurations. The outputs can swing at 9 V/μs, measured with a 200 V supply and a 15 pF load. The HV264 operates with a 200 V and a 5 V supply.

With an integrated high-value gain setting resistor for internal feedback (66,7 V/V), no external passives for feedback are needed. Internal voltage swing is designed to proceed between 50 mV and 2,85 V on the input, with the output ranging from 3,33 V to V_PP – 10 V.